Process Analyzer

Ultra-pure PTFE Teflon Sensor – PR33S

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An all-purpose refractometer for large pipe and vessel installations. Installation through a flange or a clamp connection. Area classification Zone 2 (Class I, Div. 2); Intrinsically safe process refractometer PR-23-GP-IA Area classification Zone 0 and Zone 1.

  • Real-time the chemical concentrations and provides an Ethernet output
    signal and immediate feedback, if the chemical is not within the specifications
  • Fully digital instrument: No calibration drift and no adjustment or recalibration over time.

K-Patents Semicon Process Refractometer PR-33-S monitors real-time the consistency of liquid chemical concentrations in the ultra-clean semiconductor fabrication processes and integrated process tools. Typical uses of K-Patents PR-33-S include:

  • Preventing wrong chemicals or wrong concentrations from entering the process tool or
    the wet bench and thus helping to prevent expensive equipment damage and wafer scrap.
  • Assisting in optimizing etch process and in increasing the bath life of the etch solution
  • Increasing wafer throughput typically by up to 20%, and reducing cleaning chemical
    (e.g. EKC-265) consumption in the post etch polymer removal.
  • Helping to achieve tight control of CMP slurries and better uniformity of the planarization process

Technical Details

Refractive Index Range (Standard)Full range, nD=1.3200…1.5300 (corresponds to 0…100% b.w.), Spinel prism
Refractive Index Range
(Option)
nD=1.2600…1.4700, Sapphire prism (for Hydrofluoric acid HF)
Output UnitsnD / R.I. (Refractive Index) / Conc% / g/l
AccuracyR.I. ± 0.0002 (corresponds typically to ± 0.1% b.w.).
Repeatability and stability correspond to accuracy
Speed of Response1s undamped, damping time selectable up to 5 min
Patented CORE-opticsNo mechanical adjustments and digital measurement with 3648 pixel CCD element, 589 nm wavelength (sodium D- line) light emitting diode (LED), built-in Pt-1000 temperature sensor (linearization according to IEC 751)
Temperature CompensationAutomatic, digital compensation
Instrument VerificationNIST traceable calibration, verification with standard R.I. liquids and K-Patents documented procedure (ISO 9000)
Sensor PR-33-S
Sensor Wetted PartsUltra-pure PTFE Teflon®, prism gasket Teflon®, prism Spinel (standard), O-ring Kalrez, adaptor Sapphire
Sensor HousingPTFE Teflon®
Process ConnectionFlare fittings or Pillar fittings; fitting sizes 1/4 inch, 1/2 inch, 3/4 inch or 1 inch
Process Temperature-20°C (-4°F)…85°C (185°F)
Ambient Temperature-20°C (-4°F)…45°C (113°F)
Sensor Protection ClassIP67, Nema 4X
Sensor Weight1.2 kg (2.6 lbs)
Outputs and ConnectionsIEEE 802.3af PoE (Power over Ethernet) for power supply and data transfer, directly connectable to an Ethernet LAN (Local Area Network)
Power ConsumptionMax. 1W
Ethernet Connection10/100Base-T Ethernet
Remote FunctionsRemote access with a web browser, data acquisition through UDP/IP
PatentsUS Patents US6067151 and US6760098B2, German Patent DE19855218
Sensor CableFEP-covered Ethernet cable between sensor and PoE switch; cable type Cat 5e Ethernet with RJ-45 connector, cable length 10 m (33 ft)
OptionsIEEE 802.3af compliant PoE switch (4 + 4 ports, 48 Vdc input); Power supply unit for the PoE adapter (84-264 Vac); Ethernet to mA output unit (2 x 4-20 mA)

Note: Specification are subject to change without notice.