Ultra-pure PTFE Teflon Sensor – PR33S
An all-purpose refractometer for large pipe and vessel installations. Installation through a flange or a clamp connection. Area classification Zone 2 (Class I, Div. 2); Intrinsically safe process refractometer PR-23-GP-IA Area classification Zone 0 and Zone 1.
- Real-time the chemical concentrations and provides an Ethernet output
signal and immediate feedback, if the chemical is not within the specifications
- Fully digital instrument: No calibration drift and no adjustment or recalibration over time.
K-Patents Semicon Process Refractometer PR-33-S monitors real-time the consistency of liquid chemical concentrations in the ultra-clean semiconductor fabrication processes and integrated process tools. Typical uses of K-Patents PR-33-S include:
- Preventing wrong chemicals or wrong concentrations from entering the process tool or
the wet bench and thus helping to prevent expensive equipment damage and wafer scrap.
- Assisting in optimizing etch process and in increasing the bath life of the etch solution
- Increasing wafer throughput typically by up to 20%, and reducing cleaning chemical
(e.g. EKC-265) consumption in the post etch polymer removal.
- Helping to achieve tight control of CMP slurries and better uniformity of the planarization process
|Refractive Index Range (Standard)||Full range, nD=1.3200…1.5300 (corresponds to 0…100% b.w.), Spinel prism|
|Refractive Index Range|
|nD=1.2600…1.4700, Sapphire prism (for Hydrofluoric acid HF)|
|Output Units||nD / R.I. (Refractive Index) / Conc% / g/l|
|Accuracy||R.I. ± 0.0002 (corresponds typically to ± 0.1% b.w.).|
Repeatability and stability correspond to accuracy
|Speed of Response||1s undamped, damping time selectable up to 5 min|
|Patented CORE-optics||No mechanical adjustments and digital measurement with 3648 pixel CCD element, 589 nm wavelength (sodium D- line) light emitting diode (LED), built-in Pt-1000 temperature sensor (linearization according to IEC 751)|
|Temperature Compensation||Automatic, digital compensation|
|Instrument Verification||NIST traceable calibration, verification with standard R.I. liquids and K-Patents documented procedure (ISO 9000)|
|Sensor Wetted Parts||Ultra-pure PTFE Teflon®, prism gasket Teflon®, prism Spinel (standard), O-ring Kalrez, adaptor Sapphire|
|Sensor Housing||PTFE Teflon®|
|Process Connection||Flare fittings or Pillar fittings; fitting sizes 1/4 inch, 1/2 inch, 3/4 inch or 1 inch|
|Process Temperature||-20°C (-4°F)…85°C (185°F)|
|Ambient Temperature||-20°C (-4°F)…45°C (113°F)|
|Sensor Protection Class||IP67, Nema 4X|
|Sensor Weight||1.2 kg (2.6 lbs)|
|Outputs and Connections||IEEE 802.3af PoE (Power over Ethernet) for power supply and data transfer, directly connectable to an Ethernet LAN (Local Area Network)|
|Power Consumption||Max. 1W|
|Ethernet Connection||10/100Base-T Ethernet|
|Remote Functions||Remote access with a web browser, data acquisition through UDP/IP|
|Patents||US Patents US6067151 and US6760098B2, German Patent DE19855218|
|Sensor Cable||FEP-covered Ethernet cable between sensor and PoE switch; cable type Cat 5e Ethernet with RJ-45 connector, cable length 10 m (33 ft)|
|Options||IEEE 802.3af compliant PoE switch (4 + 4 ports, 48 Vdc input); Power supply unit for the PoE adapter (84-264 Vac); Ethernet to mA output unit (2 x 4-20 mA)|
Note: Specification are subject to change without notice.